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Single Crystal Silicon Showerhead Hole Drilling

Workpiece

  • Single Crystal Silicon
  • Hole: D0.65x15mm
  • Depth-Diameter Ratio: 23:1

Challenges

  • Vulnerable to hole edge chipping
  • Long cycle time
  • Short tool life

Benefits

  • No chipping around hole edges
  • Cycle time reduced by 50%, from 9min to 4.5min per hole
  • Stable and continuous drilling of over 6,000 holes with one cutting tool
  • Significant improvement of hole roundness and positional tolerance

Workpiece

Benefits

  • Nomex Honeycomb Contouring

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Challenges

  • Uneven machined surface, severe burrs and excessive dust
  • Vulnerable to workpiece deformation, tearing and collapse due to compression
 
 
  • Burr reduction by 90%
  • Efficient 5-axis contouring of complicated shapes
  • Optional fully-closed protection and vacuum system against dust and explosion

 

Workpiece

  • Nomex Honeycomb Contouring

 

 

 

 

 

 

Challenges

  • Uneven machined surface, severe burrs and excessive dust
  • Vulnerable to workpiece deformation, tearing and collapse due to compression

Benefits

  • Burr reduction by 90%
  • Efficient 5-axis contouring of complicated shapes
  • Optional fully-closed protection and vacuum system against dust and explosion