Quartz Glass Showerhead Drilling
Benefits:
+ Continuous Drilling of 1,200 D0.5x5mm holes
+ Cycle time reduced by 72%, from 270s to 75s per hole
+ Hole edge chipping decreased by 68%, from 0.4mm to 0.13mm
Quartz Glass Substrate Chamfer & Side Machining
Benefits:
+ 88% cycle time reduction, from 120min to 14.5min
+ Qualified roughness without grinding marks
Single Crystal Silicon Showerhead Hole Drilling
Benefits:
+ No chipping around hole edges
+ Cycle time reduced by 50%, from 9min to 4.5minper hole
+ Stable and continuous drilling of over 6,000 holes with one cutting tool
+ Significant improvement of hole roundness and positional tolerance
Single Crystal Silicon Showerhead Hole Drilling
Benefits:
+ Continuous machining of over 1,000 D0.45x23mm ultra-deep holes
+ No obvious chipping around hole edges
+ Hole roundness 0.003mm
+ Hole wall roughness down by 99%, from Ra 6.54μm to Ra 0.088μma