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AlSiC Threaded Hole Machining

Benefits:

+ Tool life improved by 300 times (54 holes/tool)

+ Cycle time shortened by 90%, from 3600s/hole to 360s/hole

+ Replacing manual operation to CNC thread milling

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Quartz Glass Showerhead Drilling

Benefits:

+ Continuous Drilling of 1,200 D0.5x5mm holes

+ Cycle time reduced by 72%, from 270s to 75s per hole

+ Hole edge chipping decreased by 68%, from 0.4mm to 0.13mm

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Quartz Glass Substrate Chamfer & Side Machining

Benefits:

+ 88% cycle time reduction, from 120min to 14.5min

+ Qualified roughness without grinding marks

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Single Crystal Silicon Showerhead Hole Drilling

Benefits:

+ No chipping around hole edges

+ Cycle time reduced by 50%, from 9min to 4.5minper hole

+ Stable and continuous drilling of over 6,000 holes with one cutting tool

+ Significant improvement of hole roundness and positional tolerance

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Single Crystal Silicon Showerhead Hole Drilling

Benefits:

+ Continuous machining of over 1,000 D0.45x23mm ultra-deep holes

+ No obvious chipping around hole edges

+ Hole roundness 0.003mm

+ Hole wall roughness down by 99%, from Ra 6.54μm to Ra 0.088μma

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