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Polysilicon Slotted Confinement Ring

Conprofe Benefits

Reduced cutting force and improved efficiency with ultrasonic machining

Lower surface roughness

Reduced chipping or crack

Improved hole roundness

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ポリシリコンゲートリング加工

加工の優位性

超音波補助加工がより安定し、切削抵抗が低いため、加工効率が向上

ワーク表面の粗さが低減

欠けやひび割れが低減

内円の真円度が効果的に向上

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Carbon Silicon Showerhead Hole Drilling

Conprofe Benefits

Continuously machining over 100 D0.5×6.5mm holes

   (Depth-Diameter Ratio 13:1)

Smooth hole wall and good hole quality (Hole chipping size <0.02mm)

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炭化ケイ素スプレープレートの穴あけ加工

加工の優位性

D0.5×6.5mmの穴を100個安定して連続的に加工

   (アスペクト比13:1)

穴壁が滑らかであり、穴の開口部のチッピングが0.02mm以下

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AlSiC Threaded Hole Machining

Conprofe Benefits

Tool life improved by 300 times (54 holes/tool)

Cycle time shortened by 90%, from 3600s/hole to 360s/hole

Replacing manual operation to CNC thread milling

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石英ガラススプレープレートの穴あけ加工

加工の優位性

D0.5x5mmの穴を1,200個安定して連続的に加工可能(アスペクト比10:1)

穴一個当たりの加工時間は270秒から75秒まで72%短縮

穴壁が滑らかで、穴の開口部のチッピング量は0.4㎜から0.13mmへと68%減

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Quartz Glass Showerhead Drilling

Conprofe Benefits

Continuous drilling of 1,200 D0.5x5mm holes

Cycle time reduced by 72%, from 270s to 75s per hole

Hole edge chipping decreased by 68%, from 0.4mm to 0.13mm

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Quartz Glass Substrate Chamfer & Side Machining

 Conprofe Benefits

88% cycle time reduction, from 120min to 14.5min

Qualified roughness without grinding marks

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Single Crystal Silicon Showerhead Hole Drilling

Conprofe Benefits

No chipping around hole edges

Cycle time reduced by 50%, from 9min to 4.5min per hole

Stable and continuous drilling of over 6,000 holes with one cutting tool

Significant improvement of hole roundness and positional tolerance

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単結晶シリコン曲面電極穴開け加工

加工の優位性

PCDドリルはD0.45*24.75mmの微細超深穴を連続で2000個加工できる(アスペクト比55:1

ブラインド穴加工、穴の入口部はチッピングがないと目視で確認できる

穴の真円度が0.003㎜

穴壁の粗さは6.540μmから0.013μmへと99.8%低減

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