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Single Crystal Silicon Showerhead Hole Drilling

Workpiece

  • Single Crystal Silicon
  • Evenly distributed D0.45x23mm blind holes
  • Depth-Diameter Ratio: 51:1

Challenges

  • Hole wall roughness ≥Ra 6.54μm
  • Hole roundness ≥0.025mm

Benefits

  • Continuous machining of over 1,000 D0.45x23mm ultra-deep holes
  • No obvious chipping around hole edges
  • Hole roundness 0.003mm
  • Hole wall roughness down by 99%, from Ra 6.54μm to Ra 0.088μm

Workpiece

Benefits

  • Nomex Honeycomb Contouring

图片宽度:400px, 图片高度:293px

 

 

 

 

 

 

 

Challenges

  • Uneven machined surface, severe burrs and excessive dust
  • Vulnerable to workpiece deformation, tearing and collapse due to compression
 
 
  • Burr reduction by 90%
  • Efficient 5-axis contouring of complicated shapes
  • Optional fully-closed protection and vacuum system against dust and explosion

 

Workpiece

  • Nomex Honeycomb Contouring

 

 

 

 

 

 

Challenges

  • Uneven machined surface, severe burrs and excessive dust
  • Vulnerable to workpiece deformation, tearing and collapse due to compression

Benefits

  • Burr reduction by 90%
  • Efficient 5-axis contouring of complicated shapes
  • Optional fully-closed protection and vacuum system against dust and explosion